Riah, B.; Ayad, A.; Camus, J.; Djouadi, M.A.; Rouag, N.
(Université Frères Mentouri - Constantine 1, 2016-12-14)
We have studied the texture evolution of Aluminum nitride (AlN) thin. AlN thin films were deposited on Si (100) substrate by dc magnetron sputtering (dcMS) and High Power Impulse Magnetron Sputtering (HiPIMS) technics.We ...