Etude et simulation d’une décharge plasma à couplage inductif.

Abstract

The objective of the work presented in this thesis is a contribution to the development of electrical and hydrodynamic models allowing the modeling of the physical phenomena that occur in inductively coupled radiofrequency plasma discharges. It represents the development of a self-coherent fluid model in a GEC reference cell reactor which allows the determination of the distribution of different charged particles, electron temperature, electric field, and plasma potential, as well as to study the effect of discharge parameters, such as the composition of the gas, the pressure in the reactor as well as the appliedpower, in a reactive cold plasmas formed in discharges excited by an electric field, on the plasma properties. The model is developed using the COMSOL multiphysics software. The software is based on solving the first three moments of the Boltzmann equation (continuity equations, momentum transfer equation, and the energy of electrons equation) coupled to the Poisson and Maxwell’s equations, by the finite element method. The model is applied, at first, to study the properties of plasma created in a mixture of oxygen and argon. Then, it is used to analyze the effect of discharge conditions on the growth rate of silicon films deposited by ICP-CVD, from plasma composed of argon, hydrogen and silane.